Fundamental Study on Precision Ultrasonic Vibration Polishing

The effectiveness of ultrasonic vibration polishing, a polishing method in which an abrasive wheel is vibrated perpendicular to the polishing direction, was investigated. A 3mm diameter cBN abrasive electroplated wheel (#800) was used as the abrasive wheel, and it was vibrated at a frequency of 38kHz and a maximum amplitude of 5.0µm (0-p). Truncation was also performed to make the abrasive grain height of the wheel uniform. Two types of truncation were performed: film lapping and PCD lapping, and the effects of truncation were investigated. Polishing experiments were performed on SKH51, and a comparison was made with conventional polishing and the effects of truncation. The results showed that ultrasonic vibration polishing using a truncated wheel improved the polishing efficiency and surface roughness.