Fabrication of high-performance silver-based transparent-electrode films on ITO multilayer structures
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Author list: Aiempanakit K., Rakkwamsuk P., Dumrongrattana S.
Publication year: 2009
Journal: Kasetsart Journal - Natural Science (0075-5192)
Volume number: 43
Issue number: 5 SUPPL.
Start page: 365
End page: 371
Number of pages: 7
ISSN: 0075-5192
Languages: English-Great Britain (EN-GB)
Abstract
A high-performance transparent-electrode film with a silver-based (Ag) sandwich structure in between an ITO (tin-doped indium oxide) multilayer was deposited on a glass substrate by DC magnetron sputtering at room temperature. The optical and electrical properties of single layers of Ag and of ITO and multilayer structures of ITO/Ag/ITO (S1), ITO/Ag/ITO/Ag/ITO (S2) and ITO/AgATO/Ag/ITO/Ag/ITO (S3) were investigated by spectrophotometer and four-point probe, respectively. These properties were studied as-deposited and after annealing in a vacuum. It was found that the optical transmittance and the sheet resistance of the Ag film decreased when the film thickness increased. However, the optical transmittance of the Ag film could be enhanced by a sandwich structure composed of ITO/Ag/ITO. The average optical transmittance in the visible and near infrared range of S1 and S2 decreased when the film systems were annealed in a vacuum. The sheet resistance of S2 was lower than that of S1 and S3 for the as-deposited process, while the sheet resistance of S1 was lower than that of S2 and S3 after annealing in a vacuum. These results depended on the characteristics of the multilayer electrodes and on structural improvements of the Ag and ITO components after annealing the films.
Keywords
Indium tin oxide
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