Simulation and experiment of PDMS based thermopnuematic microvalve in microfluidic chip
Conference proceedings article
ผู้เขียน/บรรณาธิการ
กลุ่มสาขาการวิจัยเชิงกลยุทธ์
ไม่พบข้อมูลที่เกี่ยวข้อง
รายละเอียดสำหรับงานพิมพ์
รายชื่อผู้แต่ง: Mongpraneet S., Wisitsora-at A., Kamnerdtong T., Jongpardist P., Tuantranont A.
ผู้เผยแพร่: Hindawi
ปีที่เผยแพร่ (ค.ศ.): 2009
Volume number: 1
หน้าแรก: 458
หน้าสุดท้าย: 461
จำนวนหน้า: 4
ISBN: 9781424433889
นอก: 0146-9428
eISSN: 1745-4557
ภาษา: English-Great Britain (EN-GB)
บทคัดย่อ
A thermopneumatic microvalve for switching fluid in a microchannel of PDMS based microfluidic chip was designed and fabricated from multi-stack PDMS structure on a glass substrate. Microvalve structure consists of inlet and outlet, microchannel, a thermopneumatic actuation chamber, and a thin film heater. In microchannel, fluid is blocked or passed by the motion of actuation diaphragm. Actuation diaphragm is bent up and down by exploiting air expansion that is induced by increasing heater temperature. The microvalve was designed and simulated by ABQUS program, mechanical commercial finite element simulation software, to predict its characteristics and optimize the design. The microvalve created for simulation model has a diameter of 2.5 mm and a total height of 450 μm. The microvalve was then fabricated on glass substrate by low cost processes including PDMS spinning, oxygen plasma bonding, electroplated micromasking, and thermal evaporation. The microvalve characteristics were measured as a function of applied voltage and inlet pressure. From the experiment, a maximum inlet pressure of 10 kPa can be applied with 7 -17 V applied voltage to the microvalve heater. The leak rate and maximum inlet pressure results obtained from ABQUS program agree well with the experimental data. ©2009 IEEE.
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