Dynamic in situ spectroscopic ellipsometric study in inhomogeneous TiO 2 thin-film growth
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Author list: Horprathum M., Chindaudom P., Limnonthakul P., Eiamchai P., Nuntawong N., Patthanasettakul V., Pokaipisit A., Limsuwan P.
Publisher: American Institute of Physics
Publication year: 2010
Journal: Journal of Applied Physics (0021-8979)
Volume number: 108
Issue number: 1
ISSN: 0021-8979
eISSN: 1089-7550
Languages: English-Great Britain (EN-GB)
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Abstract
We investigate the film-growth process of the inhomogeneous sputtered TiO2 thin films by the in situ real-time spectroscopic ellipsometer. The growth process of the film is analyzed by both the uniform and the island film growth models. Based on the analyses from the ψ-Δ trajectories, the initial thin-film growth corresponds to the island film growth model for a single-layer film. As the film grows, the microstructural phase changes cause the transition from the single-to the double-layer physical model, because of the development of the inhomogeneity in the TiO2 thin film. The dynamic fits with the double-layer physical model and the Cody-Lorentz optical model indicate three different stages of the film growth: the nucleation stage, the coalescence stage, and the continuous-layer stage. Although our presented model works well for most of the experimental data, the determination of the refractive index at the ultrathin thickness may be problematic. © 2010 American Institute of Physics.
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