Comparison of Nanocrystalline TiO2 Films Prepared on Unheated Substrates Using Single- and Dual-Cathode DC Unbalanced Magnetron Sputtering Systems

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Author list: Witit-Anun, N; Kasemanankul, P; Chaiyakun, S; Pokaipisit, A; Limsuwan, P

Publisher: IOP Publishing

Publication year: 2010

Journal: Japanese Journal of Applied Physics (0021-4922)

Volume number: 49

Issue number: 5

ISSN: 0021-4922

eISSN: 1347-4065

Languages: English-Great Britain (EN-GB)

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