Carbon nanotubes dispersed molybdenum oxide nanocomposite thin film gas sensor prepared by Electron Beam Evaporation
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Publication Details
Author list: Oros C., Wisitsoraat A., Phokharatkul D., Limsuwan P., Tuantranont A.
Publication year: 2011
Volume number: 9
Issue number: 1
Start page: 348
End page: 352
Number of pages: 5
ISSN: 1546-198X
eISSN: 1546-198X
Languages: English-Great Britain (EN-GB)
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Abstract
In this work, CNTs-MoOx nanocomposite thin film is prepared by a new method based on powder mixing and electron beam evaporation. The CNT powder was thoroughly mixed with CNTs-MoOx commercial powder by 0.5% wt. ratio and then evaporated on to silicon and alumina substrates by electron beam at a vacuum of 10~5 Torr. The surface and chemical structure of the materials were characterized by means of scanning electron microscopy, transmission electron microscopy and X-ray diffraction. Structural characterization showed that undoped CNTs-MoOx and CNTs-MoOx nanocomposite thin films posses similar surface morphology and orthorhombic crystal structure and CNTs were incorporated in CNTs-MoOx thin film in the form of small clusters uniformly dispersed within CNTs-MoOx matrix. It was found from gas-sensing characterization that CNTs incorporation led to an order of magnitude decrease of electrical conductivity in the temperature range between 200-400 °C. The sensitivity to ethanol was found to considerably enhance by a factor of 3-6 with CNTs incorporation. The sensors exhibit maximized response of ∼115 to 1000 ppm of ethanol at 400 °C. Copyright © 2011 American Scientific Publishers.
Keywords
Molybdenum Oxide
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