The Structure of Titanium Zirconoum Nitride Thin Films Deposited by Reactive Unbalanced Magnetron Co-sputtering

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Publication Details

Author list: Chinsakolthanakorn, S.;Buranawong, A.;Chaiyukun, S.;Limsuwan, P.

Publication year: 2011

Journal: วารสารวิจัย มหาวิทยาลัยเทคโนโลยีราชมงคลธัญบุรี (1686-8420)

Volume number: 14

Issue number: 1

Start page: 244

End page: 247

ISSN: 1686-8420

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