Structural, optical and hydrophilic properties of nanocrystalline TiO 2 ultra-thin films prepared by pulsed dc reactive magnetron sputtering
Journal article
Authors/Editors
Strategic Research Themes
No matching items found.
Publication Details
Author list: Horprathum M., Eiamchai P., Limnonthakul P., Nuntawong N., Chindaudom P., Pokaipisit A., Limsuwan P.
Publisher: Elsevier
Publication year: 2011
Journal: Journal of Alloys and Compounds (0925-8388)
Volume number: 509
Issue number: 13
Start page: 4520
End page: 4524
Number of pages: 5
ISSN: 0925-8388
eISSN: 1873-4669
Languages: English-Great Britain (EN-GB)
View in Web of Science | View on publisher site | View citing articles in Web of Science
Abstract
TiO2 ultra-thin (15 nm) films were deposited on silicon wafers (100) and glass slides by pulsed dc reactive magnetron sputtering in an ultra-high vacuum (UHV) system. The effects of substrate temperature, from room temperature to 400 ฐC, on structural, optical, and hydrophilic properties of the obtained films have been investigated. The structure of the films was characterized by grazing-incidence X-ray diffraction, high-resolution transmission electron microscopy, and atomic force microscopy. The optical properties were determined by UV-vis spectrophotometer and spectroscopic ellipsometry. The hydrophilic properties of the films, after exposed to ultraviolet illumination, were analyzed from contact angle measurements. The results suggested that the substrate temperature at 300 ฐC was critical in the crystalline phase transformation from amorphous to anatase in the TiO 2 films. The obtained films exhibited good qualities in the optical properties, in addition to excellent photo-induced hydrophilic activities. ฉ 2011 Published by Elsevier B.V.
Keywords
Photo-induced hydrophilic
Contact Information