Feasibility to fabricate the 45ฐ slant with anisotropic silicon etching in NaOH solution

Conference proceedings article

Authors/Editors

PICHET LIMSUWAN

Strategic Research Themes

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Publication Details

Author list: Limcharoen A., Pakpum C., Limsuwan P.

Publisher: Trans Tech Publications

Publication year: 2012

Volume number: 503-504

Start page: 615

End page: 619

Number of pages: 5

ISBN: 9783037854044

ISSN: 1022-6680

eISSN: 1662-8985

URL: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84860777437&doi=10.4028%2fwww.scientific.net%2fAMR.503-504.615&partnerID=40&md5=a9989feff4224d429b88a06998aec0b0

Languages: English-Great Britain (EN-GB)

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Abstract

The experiments to study the feasibility to fabricate the 45° slant on p-type (100)-oriented silicon wafer were done. The various mask shapes, rectangular, cross, circle and boomerang, were patterned on the SiO 2 mask by utilizing the conventional photolithography and dry etching process for investigating the anisotropic wet etch characteristic. The edge of masks were align in two crystal direction, 〈110〉 and <100> that is allowable to get a better understanding about the crystal orientation and the angle between planes in a crystal system. The very low etch rate, ≥50 nm/min, process regime was selected to fabricate the 45 ° slant with the concept is the lowest of an overall etch rate in the system to reach the level that is possible to detect the (110) plane. The etch recipe can be used for the next development work to built a housing of the laser light source for applying in a data storage technology. © (2012) Trans Tech Publications.

Keywords

45ฐslant, Anisotropic wet etching, NaOH solution, Silicon (100)