PROPERTIES OF (Ti, Al)N FILM PREPARED BY PVD CATHODIC ARC

Journal article

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Publication Details

Author list: Larpkiattaworn, S.;Chokwatvikul, C.;Surinphong, S.;Busabok, C.;Termsuksawad, P.

Publication year: 2013

Journal: Suranaree Journal of Science and Technology (0858-849X)

Volume number: 20

Issue number: 3

Start page: 221

End page: 226

ISSN: 0858-849X

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