Characterisation of C-F Polymer Film Formation on the Air-Bearing Surface Etched Sidewall of Fluorine-Based Plasma Interacting with AL(2)O(3)-TiC Substrate

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Author list: Limcharoen, A; Limsuwan, P; Pakpum, C; Siangchaew, K

Publisher: Hindawi

Publication year: 2013

Journal: Journal of Nanomaterials (1687-4110)

Volume number: 2013

ISSN: 1687-4110

eISSN: 1687-4129

Languages: English-Great Britain (EN-GB)

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