Antireflective Surface of Nanostructures Fabricated by CF4 Plasma Etching

Journal article


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Publication Details

Author listSomrang, W; Denchitcharoen, S; Eiamchai, P; Horprathum, M; Chananonnawathorn, C

Publication year2017

JournalJournal of Metals, Materials and Minerals (0857-6149)

Volume number27

Issue number1

Start page39

End page45

Number of pages7

ISSN0857-6149

LanguagesEnglish-Great Britain (EN-GB)


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Abstract

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Keywords

AntireflectionDewettingPlasma etching.


Last updated on 2023-04-10 at 07:36