Antireflective Surface of Nanostructures Fabricated by CF4 Plasma Etching
Journal article
Authors/Editors
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Publication Details
Author list: Somrang, W; Denchitcharoen, S; Eiamchai, P; Horprathum, M; Chananonnawathorn, C
Publication year: 2017
Journal: Journal of Metals, Materials and Minerals (0857-6149)
Volume number: 27
Issue number: 1
Start page: 39
End page: 45
Number of pages: 7
ISSN: 0857-6149
Languages: English-Great Britain (EN-GB)
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Abstract
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Keywords
Antireflection, Dewetting, Plasma etching.