Scanning micromirror platform based on MEMS technology for medical application

Journal article

Authors/Editors

EAKKACHAI PENGWANG

Strategic Research Themes

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Publication Details

Author list: Pengwang E., Rabenorosoa K., Rakotondrabe M., Andreff N.

Publisher: MDPI AG

Publication year: 2016

Volume number: 7

Issue number: 2

ISSN: 2072-666X

eISSN: 2072-666X

URL: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84960084105&doi=10.3390%2fmi7020024&partnerID=40&md5=249bac4985156128c4756cd303e8bbfb

Languages: English-Great Britain (EN-GB)

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Abstract

This topical review discusses recent development and trends on scanning micromirrors for biomedical applications. This also includes a biomedical micro robot for precise manipulations in a limited volume. The characteristics of medical scanning micromirror are explained in general with the fundamental of microelectromechanical systems (MEMS) for fabrication processes. Along with the explanations of mechanism and design, the principle of actuation are provided for general readers. In this review, several testing methodology and examples are described based on many types of actuators, such as, electrothermal actuators, electrostatic actuators, electromagnetic actuators, pneumatic actuators, and shape memory alloy. Moreover, this review provides description of the key fabrication processes and common materials in order to be a basic guideline for selecting micro-actuators. With recent developments on scanning micromirrors, performances of biomedical application are enhanced for higher resolution, high accuracy, and high dexterity. With further developments on integrations and control schemes, MEMS-based scanning micromirrors would be able to achieve a better performance for medical applications due to small size, ease in microfabrication, mass production, high scanning speed, low power consumption, mechanical stable, and integration compatibility. ฉ 2016 by the authors.

Keywords

Biomedical micro-actuator, BioMEMS, MEMS scanning micromirror, Micro-optics, Micro robots, MOEMS, Multi-degree-of-freedom stage, Optical MEMS