Enhanced transmission based on vertically aligned ITO NRs deposited by Ion assisted electron beam evaporation with glancing angle deposition technique

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Author list: Chaikeeree T., Nuchuay P., Kasayapanand N., Mungkung N., Arunrungrusmi S., Horprathum M., Eiamchai P., Limwichean S., Patthanasettakul V., Nuntawong N., Oros C., Denchitcharoen S., Samransuksamer B., Chindaudom P.

Publisher: Elsevier

Publication year: 2017

Volume number: 4

Issue number: 5

Start page: 6060

End page: 6064

Number of pages: 5

ISSN: 2214-7853

eISSN: 2214-7853

URL: https://www.scopus.com/inward/record.uri?eid=2-s2.0-85028401797&doi=10.1016%2fj.matpr.2017.06.094&partnerID=40&md5=28d895c19564dd3a6d7e164cb44f1ffe

Languages: English-Great Britain (EN-GB)

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Abstract

In this study, we investigated the effects on the film thickness of the vertically aligned indium-doped tin oxide nanorods (ITO NRs). The ITO nanorods of deposited time at 180 to 780 sec were deposited on the silicon wafers and ITO-coated glass substrate by the ion-assisted electron-beam evaporation with the glancing-angle deposition technique. The physical microstructures and optical properties of the prepared samples have been investigated by grazing-incident X-ray diffraction (GIXRD), field-emission scanning electron microscopy (FE-SEM), and spectrophotometry. From the results, the ITO nanorods indicated the bixbite structures. The FE-SEM micrographs showed the changes of the physical morphologies based on the increased film thickness. The angle-dependent transmission as measured from -80ฐ to 80ฐ incident angles demonstrated the increased optical transmission from the vertically aligned ITO nanorods, compared to that of the ITO-coated glass. The enhancement of the optical transmission was related to the anti-reflection and light-scattering properties of the ITO nanorods, and offered a great potential for solar cell applications. ฉ 2017 Elsevier Ltd. All rights reserved.

Keywords

Anti-reflection, Glancing-angle deposition