CORROSION RESISTANCE AND TRIBOLOGICAL STUDIES OF FLUORINATED-DLC FILM DEPOSITED BY PBII TECHNIQUE

Fluorinated Diamond-Like Carbon Film fabricated from C2H2:CF4 mixtures were used to
compare and study the effects of fluorine content on the deposition, corrosion and tribological
properties of the films prepared by plasma-based ion implantation. The structure of the films
was analyzed using Raman spectroscopy. The composition at the top surface of the films was
measured using Energy Dispersive X-ray Spectroscopy. The surface hardness of the films
was measured using a nanoindentation hardness tester. The corrosion performance of the
films was determined using potentiodynamic polarization. The tribological property of all
films was measured using a ball on disk friction tester. The results indicate that with
increasing fluorine content from 6.7 at.% to 20.6 at.%, the friction coefficient and corrosion
current density increases, while the film hardness and corrosion potential decrease. The film
hardness and corrosion potential of F-DLC film can increase the value up to 21.5 GPa and
0.009 V with fluorine content of 6.7 at.%, respectively. This is due to the formation of sp3
sites in the film. The friction coefficient of the F-DLC film with a fluorine content of 6.7 at.%
is relatively stable and demonstrates a considerable improvement in the tribological property,
with the lowest friction coefficient of 0.2. This is due to high hardness and an increase in the
sp3 bonds.