Optimization of Annealing Temperature for Thermoelectric Properties in Pt Doped Sb2Te3 Thin Films Fabricated by Magnetron Co-Sputtering
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Publication Details
Author list: Khunnapat Sriporaya, Nat Kasayapanand, Mati Horprathum, Athorn Vora-ud, Saksorn Limwichean
Publication year: 2024
Languages: English-Great Britain (EN-GB)
Abstract
Successfully fabricate the Sb2Te3 Pt doped by magnetron co – sputtering technique and varied
temperature of annealing. Annealing process has a significant impact on thickness, dimeter and thin film crystalline structure. The temperature annealing effect to atomic composition. When temperature increased, they effect to Pt decrease and Te increase follow as temperature increase. Annealing temperature has a direct impact on thermoelectric properties.
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