Temperature behavior of atmospheric-pressure non-equilibrium microwave discharge plasma jets for poly(ethylene naptharate)-surface processing
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Publication Details
Author list: Yuji T., Urayama T., Fujii S., Mungkung N., Akatsuka H.
Publisher: Elsevier
Publication year: 2008
Journal: Surface and Coatings Technology (0257-8972)
Volume number: 202
Issue number: 22-23
Start page: 5289
End page: 5292
Number of pages: 4
ISSN: 0257-8972
eISSN: 1879-3347
Languages: English-Great Britain (EN-GB)
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Abstract
To understand the mechanism of surface processing using an atmospheric-pressure non-equilibrium microwave discharge plasma jet, we used optical emission spectroscopy to measure the vibrational and rotational temperatures of plasma. A microwave (2.45 GHz) power supply was used to excite the plasma. The vibrational and rotational temperatures in the plasma were measured at approximately 0.18 eV and 0.22 eV. We also conducted plasma surface processing of polyethylene naphthalate (PEN) film to measure changes in the water contact angle before and after the PEN film was processed, as well as while the rotational temperature of the plasma increased. The hydrophilicity of the PEN film surface was found to improve as the rotational temperature of the plasma increased.
Keywords
Microwave discharge plasma jet, Optical emission spectroscopy, PEN film, Rotational temperature, Vibrational temperature
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