RIE Re-deposition Investigation of Fluorine-based Plasma Etch on AlO3-TiC Substrate

Journal article

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Publication Details

Author list: Pakpum, C.;Siangchaew, K.;Limsuwan, P.

Publication year: 2011

Journal: วารสารวิจัย มหาวิทยาลัยเทคโนโลยีราชมงคลธัญบุรี (1686-8420)

Volume number: 14

Issue number: 1

Start page: 87

End page: 92

ISSN: 1686-8420

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