Trimming Lithography: An Alternative Technology for Sub-Resolution and Sub-Wavelength Patterning

Journal article

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Publication Details

Author list: Atthi, N.;Sriklad, A.;Jeamsaksiri, W.;Hruanun, C.;Poyai, A.;Silapunt, R.

Publication year: 2012

Journal: Transactions on Electrical Engineering, Electronics, and Communications (1685-9545)

Volume number: 10

Issue number: 2

Start page: 198

End page: 207

ISSN: 1685-9545

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