Thermal heating effect on structural and mechanical property of diamond-like carbon film prepared by filtered cathodic arc

Conference proceedings article

ผู้เขียน/บรรณาธิการ

กลุ่มสาขาการวิจัยเชิงกลยุทธ์

ไม่พบข้อมูลที่เกี่ยวข้อง

รายละเอียดสำหรับงานพิมพ์

รายชื่อผู้แต่ง: Khamnaulthong N., Siangchaew K., Limsuwan P.

ผู้เผยแพร่: Trans Tech Publications

ปีที่เผยแพร่ (ค.ศ.): 2013

Volume number: 313-314

หน้าแรก: 82

หน้าสุดท้าย: 85

จำนวนหน้า: 4

ISBN: 9783037856840

นอก: 1660-9336

eISSN: 1662-7482

URL: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84876550550&doi=10.4028%2fwww.scientific.net%2fAMM.313-314.82&partnerID=40&md5=6579f4bbecf533075fe86a2d558e9a05

ภาษา: English-Great Britain (EN-GB)

ดูบนเว็บไซต์ของสำนักพิมพ์

บทคัดย่อ

Diamond-like carbon (DLC) films were deposited on magnetic recording head by Filtered Cathodic Arc (FCA) technique and a-Si base material was ion beam deposited as seed layer. To investigate the thermal stability of stack film, repeated cycle thermal heating at 200ฐC was employed. Raman spectroscopy and nanoindenter (Hysitron) were performed to understand film structure and mechanical property as a function of thermal heating conditions. The roles of heating in material composition and wear behavior of DLC films are discussed. The Raman spectra revealed that G position, FWHM of G peak and Id/Ig change as with increasing heating cycle which agreed well with wear depth measured. With these results suggesting DLC film degraded with repeated heating at 200 ฐC. ฉ (2013) Trans Tech Publications, Switzerland.

คำสำคัญ

Thermal heating