Thermal heating effect on structural and mechanical property of diamond-like carbon film prepared by filtered cathodic arc

Conference proceedings article

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Publication Details

Author list: Khamnaulthong N., Siangchaew K., Limsuwan P.

Publisher: Trans Tech Publications

Publication year: 2013

Volume number: 313-314

Start page: 82

End page: 85

Number of pages: 4

ISBN: 9783037856840

ISSN: 1660-9336

eISSN: 1662-7482

URL: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84876550550&doi=10.4028%2fwww.scientific.net%2fAMM.313-314.82&partnerID=40&md5=6579f4bbecf533075fe86a2d558e9a05

Languages: English-Great Britain (EN-GB)

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Abstract

Diamond-like carbon (DLC) films were deposited on magnetic recording head by Filtered Cathodic Arc (FCA) technique and a-Si base material was ion beam deposited as seed layer. To investigate the thermal stability of stack film, repeated cycle thermal heating at 200ฐC was employed. Raman spectroscopy and nanoindenter (Hysitron) were performed to understand film structure and mechanical property as a function of thermal heating conditions. The roles of heating in material composition and wear behavior of DLC films are discussed. The Raman spectra revealed that G position, FWHM of G peak and Id/Ig change as with increasing heating cycle which agreed well with wear depth measured. With these results suggesting DLC film degraded with repeated heating at 200 ฐC. ฉ (2013) Trans Tech Publications, Switzerland.

Keywords

Thermal heating