Role of the radio frequency magnetron sputtered seed layer properties on ultrasonic spray pyrolyzed ZnO thin films
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Publication Details
Author list: Tomakin M., Onuk Z., Rujisamphan N., Shah S.I.
Publisher: Elsevier
Publication year: 2017
Journal: Thin Solid Films (0040-6090)
Volume number: 642
Start page: 163
End page: 168
Number of pages: 6
ISSN: 0040-6090
eISSN: 1879-2731
Languages: English-Great Britain (EN-GB)
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Abstract
Herein, we investigated structural and electrical properties of ultrasonic spray pyrolyzed ZnO thin films (ZnO(USP)) deposited on radio frequency sputtered ZnO nanocolumns (ZnO(Seed)) under various oxygen atmosphere on p-Si substrates. X-ray diffraction data of the samples showed that the samples had a hexagonal structure with a strong (002) preferred orientation. The grain size of ZnO(USP) samples prepared on the seed layer sputtered in 25% and 50% oxygen atmosphere decreased and surface morphology was nanopebbles. ZnO samples prepared on the seed layers exhibited sharp and predominant ultraviolet luminescence at approximately 380 nm. The current–voltage characteristics of the n-ZnO(USP)/n-ZnO(seed)/p-Si heterojunctions were significantly affected by the seed layer preparation conditions. Backward diode behavior was observed for the n-ZnO(USP)/n-ZnO(seed)/p-Si heterojunctions with high donor concentration, in which the seed layers prepared in 100% and 75% argon atmosphere. The carrier concentration value was decreased for the films with the seed layer, obtained at higher oxygen content in the sputtering atmosphere. © 2017 Elsevier B.V.
Keywords
Heterojunction, Ultrasonic spray
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